Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.214-214
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- 2003
Ambipolar EXB drift in Transversely Magnetized Capacitive Coupled Plasma
- Yu, Sin-Jae (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jo, Yong-Seok (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jang, Hong-Yeong (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jang, Chung-Seok (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jeong, Jin-Uk (Division of Electrical and Computer Engineering, Hanyang Univ.)
- Published : 2003.02.14
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