한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제24회 학술발표회 초록집
- /
- Pages.193-193
- /
- 2003
Analysis of the growth behavior of ultrathin Cu films by using in-situ impedance spectroscopy
- Park, Sang-Yun ;
- Li, S.F. ;
-
Hong, Jin-Pyo
;
-
Lee, Yeong-Baek
;
- Lee, Ju-Yeol
- 발행 : 2003.02.14