Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.183-183
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- 2003
Standardization of the Evaluation of SIMS Depth Resolution by a Standard Procedure and Multiple Delta-Layer Thin Films
- Kim, Kyung-Joong (Nano Surface Group, Korea Research Institute of Standards and Science) ;
- Kim, H.K. (Nano Surface Group, Korea Research Institute of Standards and Science) ;
- Moon, D.W. (Nano Surface Group, Korea Research Institute of Standards and Science)
- Published : 2003.02.14
Abstract
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