한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제24회 학술발표회 초록집
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- Pages.133-133
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- 2003
A New process for the Solid Phase Crystallization of a-Si by the thin film heaters
- Jung, In-Young (School of Materials Science and engineering, Seoul National University) ;
- Kim, Byoung-Dong (School of Materials Science and engineering, Seoul National University) ;
- Song, Nam-Kyu (School of Materials Science and engineering, Seoul National University) ;
- Joo, Seung-Ki (School of Materials Science and engineering, Seoul National University)
- 발행 : 2003.02.14