Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.133-133
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- 2003
A New process for the Solid Phase Crystallization of a-Si by the thin film heaters
- Jung, In-Young (School of Materials Science and engineering, Seoul National University) ;
- Kim, Byoung-Dong (School of Materials Science and engineering, Seoul National University) ;
- Song, Nam-Kyu (School of Materials Science and engineering, Seoul National University) ;
- Joo, Seung-Ki (School of Materials Science and engineering, Seoul National University)
- Published : 2003.02.14
Abstract
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