Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
권호 표지

Low-temperature atomic layer deposition of AlN thin films using plasma interactions

  • Lee, Yong-Ju (Korea Advanced Institute of Science and Technology (KAIST), Department of Materials Science and Engineering) ;
  • Kang, Sang-Won (Korea Advanced Institute of Science and Technology (KAIST), Department of Materials Science and Engineering)
  • Published : 2003.02.14
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords