한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제25회 학술발표회 초록집
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- Pages.205-205
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- 2003
Two-dimensional Simulation for Magnetically Enhanced Large-Area Processing Plasma
- Cho, B.-U. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Shulika, Olga (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Lee, S.-H. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Lee, Y.-J. (Department of Materials Engineering, Sungkyunkwan University) ;
- Kim, K.-N. (Department of Materials Engineering, Sungkyunkwan University) ;
- Yeom, G.-Y. (Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, J.-K. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology)
- 발행 : 2003.08.20