Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.08a
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- Pages.197-197
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- 2003
Preparation of Crystalline $Si_{1-x}Ge_x$ Thin Films at Low Substrate Temperature
- Yang, Sung-Chae (Division of Electronics & Information Engineering, Chonbuk National University) ;
- Chu, Byung-Yoon (Division of Electronics & Information Engineering, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
- Published : 2003.08.20
Abstract
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