Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.08a
- /
- Pages.186-186
- /
- 2003
Current Measurement of Organic Resists Using an Atomic Force Microscope Lithography and Scanning Tunneling Spectroscopy
- Kim, Jeong-Oh (Department of Chemistry, Hanyang University) ;
- Shin, Wan-Sub (Department of Chemistry, Hanyang University) ;
- Lee, Hai-Won (Department of Chemistry, Hanyang University)
- Published : 2003.08.20
Abstract
Keywords