한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제25회 학술발표회 초록집
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- Pages.146-146
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- 2003
Tungsten Nitride Film Growth by MOCD for Cu Diffusion Barrier
- Lee, Brad H. (Department of the Chemical Eng., Pohang University of Science and Technology) ;
- Yong, Ki-Jung (Department of the Chemical Eng., Pohang University of Science and Technology)
- 발행 : 2003.08.20