원판형 드래그펌프 채널형상의 성능에 미치는 영향

The Effect on Performance of Disk-type Drag Pump Channel-type

The pumping characteristics of a disk-type drag pump (DTDP) from free molecular flow region to the slip flow region are calculated by the direct simulation Monte Carlo (DSMC) method. In this study, the pumping performance is studied numerically for several channel depths. The interaction between molecules is modeled by variable hard-sphere (VHS). The no time counter method is used as a collision sampling technique. The clearance between rotor and stator is considered an effect on performance. Spiral channels are cut on both upper and lower sides of rotating disks, and stationary disks are planar. A three-dimensional DSMC method for the analysis of steady rarefied flows in a single-stage DTDP has been developed. Velocity and density fields were obtained by the DSMC simulation in the rotor. The present experimental data in the outlet pressure range of $7.5{\times}10^{-3}{\sim}4$ Torr were compared with the DSMC results in the single-stage DTDP. Comparison between the experimental data and DSMC results showed good agreement.