대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)
- 대한설비공학회 2003년도 하계학술대회 논문집
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- Pages.196-196
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- 2003
공기부상방식 반도체 웨이퍼 이송시스템의 마찰계수 영향에 관한 연구
A Study on the Effect of Friction Coefficient of Semiconductor Wafer Transportation for Air Levitation System
- Moon In-ho (Department of Mechanical Engineering, Sungkyunkwan University) ;
- Hwang Young-kyu (Department of Mechanical Engineering, Sungkyunkwan University) ;
- Cho Sang-joon (Institute of Technology, Shinsung ENG Co. Ltd.) ;
- Kim Dong-kweon (Institute of Technology, Shinsung ENG Co. Ltd.)
- 발행 : 2003.07.01