Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2003.07a
- /
- Pages.195-195
- /
- 2003
Analysis on the Airflow and the Gas Contamination Characteristics in Super Clean Room
초청정 클린룸의 기류 및 가스오염 특성 해석
- Noh Kwang-Chul (Graduate school of Mechanical and Information Engineering, University of Seoul) ;
- Lee Seung-Chul (Department of Automotive Engineering, Donghae University) ;
- Oh Myung-Do (Department of Mechanical and Information Engineering, University of Seoul)
- Published : 2003.07.01
Abstract
Keywords