Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Characteristics of insulators for inorganic electroluminescent display with high stability

안정성이 확보된 무기 전계발광 표시소자용 절연막의 특성

  • 임정욱 (한국전자통신연구원 정보표시소자팀) ;
  • 윤선진 (한국전자통신연구원 정보표시소자팀)
  • Published : 2003.04.19
Download PDF
⟨ Previous Next ⟩

Abstract

Compared to a conventional atomic layer deposition (ALD) grown Al203 film, Plasma enhanced ALD (PEALD) grown AION film was revealed to possess a large breakdown field, which is necessary for stable operation of thin film electroluminescent (TFEL) device. Also, AION is more stable than Al203 films grown by PEALD or by ALD after post-annealing process, which is inevitably required to improve luminance property of phosphor. Furthermore, AION films were applied to insulators of ZnS:Tb TFEL device. Resultant1y, they show better stability than ALD grown insulators under high electric field.

Keywords