Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.186-189
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- 2003
Characterization of BLT/insulator/Si structure using $ZrO_2$ and $CeO_2$ insulator
$ZrO_2$ 와 $CeO_2$ 절연체를 이용한 BLT/절연체/Si 구조의 특성
- Lee, Jung-Mi (Chung-Ang University) ;
- Kim, Kyoung-Tae (Chung-Ang University) ;
- Kim, Chang-Il (Chung-Ang University)
- Published : 2003.05.16
Abstract
The MFIS capacitors were fabricated using a metalorganic decomposition method. Thin layers of