Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.154-157
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- 2003
The properties of $TiO_2$ thin films by oxygen partial pressure
산소 분압비에 따른 $TiO_2$ 박막의 특성평가
- Yang, Hyun-Hun (Mokpo National University, Dept. of Electrical Engineering) ;
- Lim, Jeong-Myung (Mokpo National University, Dept. of Electrical Engineering) ;
- Park, oung-Yun (Mokpo National University, Dept. of Electrical Engineering) ;
- Jeong, Woon-Jo (Mokpo National University, Dept. of Electrical Engineering) ;
- Park, Gye-Choon (Mokpo National University, Dept. of Electrical Engineering)
- Published : 2003.05.16
Abstract