한국전자파학회:학술대회논문집 (Proceedings of the Korea Electromagnetic Engineering Society Conference)
- 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
- /
- Pages.173-177
- /
- 2003
박막공진기에 대한 새로운 모델링 기법
A New Modeling Methodology of TFBAR
- Kim, Jong-Soo (Yonsei University) ;
- Gu, Myeong-Gweon (MEMS Solutions Inc.) ;
-
Yook, Jong-Gwan
(Yonsei University)
- 발행 : 2003.11.15
초록
In this paper, a new modeling methodology of thin film bulk acoustic resonate. (TFBAR) is presented. The new model is started from the Mason model that is a good model to explain the physical characteristics of TFBAR. After simplifying the modified Mason model added dielectric loss term to conventional Mason model, the improved Modified Butterworth-Van Dyke (MBVD) model similar to conventional MBVD model is complete. The proposed model has three optimization variables those are half of the MBVD model. As a result, the curve fittings for the measured data are faster and smarter than any other model.