한국전자파학회:학술대회논문집 (Proceedings of the Korea Electromagnetic Engineering Society Conference)
- 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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- Pages.163-167
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- 2003
RF MEMS 인덕터의 특성 추출을 위한 De-embedding방법
Accurate De-embedding Scheme for RF MEMS Inductor
- Lee, Young-Ho (Yonsei University) ;
- Kim, Yong-Dae (Yonsei University) ;
- Kim, Ji-Hyuk (Seoul National University) ;
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Yook, Jong-Gwan
(Yonsei University)
- 발행 : 2003.11.15
초록
In this paper, an air-suspension type RF MEMS inductor is fabricated, and an appropriate de-embedding scheme for 3-dimenstional MEMS structure is applied and verified with inductance calculation algorithm. With the presented de-embedding method, parasitics from contanct pads and feeding lines are effectively and accurately de-embedded using open and short calibration procedure, and only spiral and posts can be characterized as a high-Q inductor structure. The validity of the de-embedding method is verified by the comparison of the measured and calculated inductances of two 1.5 and 2.5 turn square spiral inductors. The open-short de-embedded inductance error is below 5% each case in comparison with the calculated value based on H.M. Greenhouse's algorithm.