Proceedings of the Korean Institute of Resources Recycling Conference (한국자원리싸이클링학회:학술대회논문집)
- 2003.10a
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- Pages.185-189
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- 2003
The Synthesis of Diamond/WC-Co Thin Film by HE-CVD
HE-CVD법에 의한 Diamond/WC-Co 박막합성
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Lee, Kee-Sun
(Division of Advanced Materials Engineering, Kongju National University)
;
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Seo, Sung-Man
(Division of Advanced Materials Engineering, Kongju National University)
;
- Shin, Dong-Uk (Division of Advanced Materials Engineering, Kongju National University) ;
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Kim, Dong-Sun
(Department of Chemical Engineering, Kongju National University)
- Published : 2003.10.15
Abstract
The effect of surface roughness of the substrate on HF-CVD diamond coating was researched. The surface roughness was changed variously by electro-chemical etching conditions. The etching process acted to remove the metallic cobalt from the WC-Co. Diamond nucleation density was higher in etched the substrate. Therefore, the etching process was effective in both Co-removal and higher surface roughness, leading to the improving the diamond nucleation and deposition.
Keywords