한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.924-927
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- 2003
The Precursor Ratio Effects on the Electrical and Optical Properties of the ZnO:Al Transparent Conducting Oxide Grown by ALD Method
- Kwon, Sang-Jik (Dept. of Electronics Eng., Kyungwon University) ;
- Lee, Hyun-Jae (Dept. of Electronics Eng., Kyungwon University) ;
- Jeong, Hak-June (Dept. of Electronics Eng., Kyungwon University) ;
- Seo, Yong-Woon (ITM Inc.) ;
- Jeong, Heui-Seob (ITM Inc.) ;
- Hwang, Man-Soo (ITM Inc.)
- Published : 2003.07.09
초록
Aluminium-doped ZnO (ZnO:Al) films were grown by atomic layer-controlled deposition on glass substrates at temperature of 200
키워드