한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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The Study of Sequential Lateral Solidification Process as a Function of Laser Intensity

  • Jang, Sung-Jin (Display Device Center, Samsung Electronics Co.) ;
  • Kim, Byoung-Joo (Display Device Center, Samsung Electronics Co.) ;
  • Kim, Hyun-Jae (Display Device Center, Samsung Electronics Co.) ;
  • Kang, Myung-Koo (Display Device Center, Samsung Electronics Co.) ;
  • Souk, Jun-Hyung (Display Device Center, Samsung Electronics Co.) ;
  • Kim, Do-Young (New materials Lab.(BK21 Lab.) School of Information and Computer Engineering, Sungkyunkwan University) ;
  • Suh, Chang-Ki (New materials Lab.(BK21 Lab.) School of Information and Computer Engineering, Sungkyunkwan University) ;
  • Dhungel, Suresh Kumar (New materials Lab.(BK21 Lab.) School of Information and Computer Engineering, Sungkyunkwan University) ;
  • Yi, Jun-Sin (New materials Lab.(BK21 Lab.) School of Information and Computer Engineering, Sungkyunkwan University)
  • Published : 2003.07.09
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Abstract

We report the suitable SLS (sequential lateral solidification) as a function of laser intensity. Precursor film is changed from 50nm to 100nm and is deposited on glass substrate by PECVD. We can find the suitable SLS length by changing the mask size. In this paper, we present the well-defined grain growth conditions as a function of laser intensity.

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