한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.484-485
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- 2003
Development of fabrication process of Planar Light-wave Circuit (PLC) : Optimization of the fabrication process of planar light-wave circuit by Hybrid Sol-Gel methods
- Jang, Won-Gun (Korea Photonics Technology Institute (KOPTI)) ;
- Kim, Chung-Ryeol (Korea Photonics Technology Institute (KOPTI)) ;
- Kim, Jae-Pil (Korea Photonics Technology Institute (KOPTI)) ;
- Park, Young-Sik (Korea Photonics Technology Institute (KOPTI))
- Published : 2003.07.09
Abstract
We report on the optimization of the fabrication process of hybrid sol-gel thin film deposition to produce low cost
Keywords