Fabrication of High Performance Plastic MIM-LCDs

  • Published : 2003.07.09

Abstract

We have developed flexible MIM LCDs by using plastic film substrate. MIM array and cells were fabricated with low temperature process and material technology. As an insulator of MIM, SiNx was introduced at the low temperature allowable for plastic substrate. The fabricated MIM devices show high electrical performance for LC driving. We discuss its process and characteristics.

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