Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.11a
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- Pages.579-582
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- 2003
Evaluation of Ozone Concentration for the Oxide Thin Film Growth
- Park, No-Bong (Chungju Univ.) ;
- Iim, Jung-Kwan (Dongshin Univ.) ;
- Park, Yong-Pil (Dongshin Univ.) ;
- Lee, Hee-Kab (KCCI)
- Published : 2003.11.13
Abstract
Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.
Keywords
- ozone condensation;
- absolute ozone concentration;
- thermal decomposition method;
- Q-mass analyzing method