한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.571-574
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- 2003
순차 스퍼터 법과 증발 법으로 제작한 박막의 특성
Characteristics of Thin Films Fabricated by Using the Layer-by-Layer Sputtering and Evaporation Method
- Cheon, Min-Woo (DongShin Univ.) ;
- Park, Yong-Pil (DongShin Univ.) ;
- Kim, Jeong-Ho (KOPTI)
- 발행 : 2003.11.13
초록
The thin films fabricated by using the layer-by-layer sputtering was compared with the thin film fabricated by using the evaporation method. Re-evaporation in the form of Bi atoms or