한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.408-411
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- 2003
ZnO:Al투명전도막의 전기적 특성에 미치는 Bias 전압의 영향
Effect of substrate bias on electrical properties of ZnO:Al transparent conducting film
- Park, Kang-Il (Kyungsung Uni) ;
- Kim, Byung-Sub (Kyungsung Uni) ;
- Lim, Dong-Gun (Chungiu National Uni.) ;
- Lee, Su-Ho (Kyungsung Uni) ;
- Kwak, Dong-Joo (Kyungsung Uni)
- 발행 : 2003.11.13
초록
Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure, discharge power and doping amounts of Al on the electrical, optical and morphological properties were investigated experimentally. The effect of bias voltage on the electrical properties of ZnO thin film were also studied. Films with lowest resistivity of