한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.103-107
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- 2003
표면탄성파 필터 제작을 위한 Pt 박막 식각
Etching of Pt Thin Film for SAW Filter Fabrication
- 최용희 (인하대학교 정보통신공학과 m-Parc) ;
- 송호영 (인하대학교 정보통신공학과 m-Parc) ;
- 박세근 (인하대학교 정보통신공학과 m-Parc) ;
- 이택주 (인하대학교 정보통신공학과 m-Parc) ;
- 오범환 (인하대학교 정보통신공학과 m-Parc) ;
- 이승걸 (인하대학교 정보통신공학과 m-Parc) ;
- 이일항 (인하대학교 정보통신공학과 m-Parc)
- Choi, Yong-Hee (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- Song, Ho-Young (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- Park, Se-Geun (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- Lee, Taek-Joo (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- O, Beom-Hoan (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- Lee, Seung-Gol (Department of Information and Communication Engineering, m-Parc, Inha University) ;
- Lee, El-Hang (Department of Information and Communication Engineering, m-Parc, Inha University)
- 발행 : 2003.11.13
초록
The inductively coupled plasma(ICP) etching process was selected to fabricate RF Surface Acoustic Wave(SAW) filters and a Pt thin film was sputtered on a