한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.84-87
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- 2003
질화탄소막을 이용한 MIS 캐패시터의 정전용량 - 전압 특성
Capacitance - Voltage Characteristics of MIS Capacitors Using Carbon Nitride Films
- Ha, Se-Geun (Department of Electrical and Electronic Engineering, Kyungnam University) ;
- Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam University) ;
- Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam University)
- 발행 : 2003.11.13
초록
Carbon nitride (