한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.71-75
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- 2003
플라즈마 화학 기상 증착법을 이용한 탄소나노튜브의 성장 분석 및 전계방출 특성
Field Emission Characteristics and Growth Analysis of Carbon Nanotubes by plasma-enhanced chemical vapor deposition
- Oh, Jung-Keun (Chungbuk National Uni) ;
- Ju, Byeong-Kwon (KIST) ;
- Kim, Nam-Soo (Chungbuk National Uni)
- 발행 : 2003.11.13
초록
Carbon nanotubes(CNTs) are grown by using Co catalyst metal. CNTs fabricated by PECVD(plasma enhanced chemical vapor deposition) method are studied in terms of surface reaction and surface structure by TEM and Raman analysing method and are analysed in its electrical field emission characteristics with variation of space between anode and cathode. Acetylene(