Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07b
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- Pages.1111-1114
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- 2003
Electron Density Measurement of Inductively Coupled Plasma Using Langmuir Probe
Langmuir Probe를 이용한 유도결합형 플라즈마의 전자 밀도 측정
- Lee, Young-Hwan (School of Electrical Electronic and Information Engineering, Wonkwang Univ.) ;
- Jo, Ju-Ung (School of Electrical Electronic and Information Engineering, Wonkwang Univ.) ;
- Kim, Kwang-Soo (School of Electrical Electronic and Information Engineering, Wonkwang Univ.) ;
- Park, Dae-Hee (School of Electrical Electronic and Information Engineering, Wonkwang Univ.)
- 이영환 (원광대학교 전기 전자 및 정보 공학부) ;
- 조주웅 (원광대학교 전기 전자 및 정보 공학부) ;
- 김광수 (원광대학교 전기 전자 및 정보 공학부) ;
- 박대희 (원광대학교 전기 전자 및 정보 공학부)
- Published : 2003.07.10
Abstract
In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of argon gas pressure. The RF output was applied in the range of