한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.995-998
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- 2003
VHF-PECVD를 이용한 다결정 실리콘 박막 증착 및 태양전지 제조
Poly-Si Thin Film and Solar Cells by VHF-PECVD
- 이정철 (한국에너지기술연구원 태양광연구센터) ;
- 정연식 (한국에너지기술연구원 태양광연구센터) ;
- 김석기 (한국에너지기술연구원 태양광연구센터) ;
- 윤경훈 (한국에너지기술연구원 태양광연구센터) ;
- 송진수 (한국에너지기술연구원 태양광연구센터) ;
- 박이준 (한국에너지기술연구원 태양광연구센터) ;
- 권성원 (한국과학기술원) ;
- 임광수 (한국과학기술원)
- Lee, J.C. (KIER Photovoltaic Research Center) ;
- Chung, Y.S. (KIER Photovoltaic Research Center) ;
- Kim, S.K. (KIER Photovoltaic Research Center) ;
- Youn, K.H. (KIER Photovoltaic Research Center) ;
- Park, I.J. (KIER Photovoltaic Research Center) ;
- Song, J.S. (KIER Photovoltaic Research Center) ;
- Kwon, S.W. (KAIST) ;
- Lim, K.S. (KAIST)
- 발행 : 2003.07.10
초록
This paper presents the deposition of poly-Si thin-film and fabrication of a solar cell by VHF-PECVD method. The poly-Si thin films. and pin-type solar cells are fabricated using multi-chamber cluster tool system. A 7.4% conversion efficiency was achieved from poly-Si thin film solar cells with total thickness less than