한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.872-875
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- 2003
석영기판에 증착된 질화탄소막의 유전특성
Dielectric Characteristics of Carbon Nitride Films on Quartz Substrate
- Ha, Se-Geun (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
- Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
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Lee, Sung-Pil
(Department of Electrical and Electronic Engineering, Kyungnam Univ.)
- 발행 : 2003.07.10
초록
Carbon nitride(