한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.641-643
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- 2003
Pt와 $LaNiO_3$ 전극에 대한 PZT(53/47) sol-gel 막의 전기적 특성
Electrical properties of PZT films on Pt and $LaNiO_3$ electrode by using sol-gel method
- Seo, Byung-Jun (Bukyong National Univ.) ;
- Yeo, Ki-Ho (Bukyong National Univ.) ;
- Ryu, Ji-Goo (Bukyong National Univ.) ;
- Kim, Kang-Eon (Bukyong National Univ.) ;
- Chung, Su-Tae (Bukyong National Univ.)
- 발행 : 2003.07.10
초록
The ferroelectric properties of PZT(53/47) thin film was investigated by methoxy enthanol solution based on sol-gel method. The thickness of each layer by spincoating 0.25M sol at one time was