Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07a
- /
- Pages.412-415
- /
- 2003
A Study on the $Si_3N_4$ Thin Films Deposited by PECVD for MMIC Capacitor
MMIC Capacitor를 위한 PECVD $Si_3N_4$ 박막에 관한 연구
- Sung, Ho-Kun (Wonkwang Uni.) ;
- Song, Min-Jong (KwangJu Health Coll.) ;
- Kim, Young-Gab (Wonkwang Uni.) ;
- Park, Choon-Bae (Wonkwang Uni.)
- Published : 2003.07.10
Abstract
[