한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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- Pages.147-150
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- 2003
고온용 실리콘 압력센서 개발
Development of the high temperature silicon pressure sensor
- Kim, Mi-Mok (Yeungnam University) ;
- Chul, Nam-Tae (Yeungnam University) ;
- Lee, Young-Tae (Andong National University)
- 발행 : 2003.07.10
초록
In this paper, We fabricated a high temperature pressure sensor using SBD(silicon- direct-bonding) wafer of