Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07a
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- Pages.147-150
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- 2003
Development of the high temperature silicon pressure sensor
고온용 실리콘 압력센서 개발
- Kim, Mi-Mok (Yeungnam University) ;
- Chul, Nam-Tae (Yeungnam University) ;
- Lee, Young-Tae (Andong National University)
- Published : 2003.07.10
Abstract
In this paper, We fabricated a high temperature pressure sensor using SBD(silicon- direct-bonding) wafer of