한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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- Pages.19-27
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- 2003
XPS Characterization and Morphology of MgO Thin Films grown on Single-Crystalline Diamond (100)
- Lee, S.M. (Technology Research Institute of Osaka Prefecture Ayumino 2-7-1) ;
- Ito, T. (Osaka Univ.) ;
- Murakami, H. (Osaka Univ.)
- 발행 : 2003.07.10
초록
Morphology and composition of MgO films grown on single-crystalline diamond (100) have been studied. MgO thin films were deposited in the substrate temperature range from room temperature (RT) to 723K by means of electron beam evaporation using MgO powder source. Atomic force microscopy images indicated that the film grown at RT without