한국전자현미경학회:학술대회논문집
- 한국현미경학회 2003년도 제34차 추계학술대회
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- Pages.52-55
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- 2003
HRTEM Study of an Epitaxial C49-TiSi2 Phase Formed on the Si(100) Substrate
- Yang, Jun-Mo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Park, Tae-Soo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Lee, Tae-Kwon (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Kim, Won (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Choi, Jin-Tae (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Lee, Soun-Young (Memory Research & Development Division, Hynix Semiconductor Inc.)
- 발행 : 2003.11.01