HRTEM Study of an Epitaxial C49-TiSi2 Phase Formed on the Si(100) Substrate
- Yang, Jun-Mo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Park, Tae-Soo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Lee, Tae-Kwon (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Kim, Won (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Choi, Jin-Tae (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
- Lee, Soun-Young (Memory Research & Development Division, Hynix Semiconductor Inc.)
- Published : 2003.11.01
Abstract
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