Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.10a
- /
- Pages.309-311
- /
- 2003
Dry Etching Characteristics of BLT Thin Film
BLT 박막의 건식 식각 특성에 관한 연구
- Kim, Dong-Pyo (School of Electrical and Electronic Engineering, Chung-Ang University) ;
- Kim, Chang-Il (School of Electrical and Electronic Engineering, Chung-Ang University)
- Published : 2003.10.31
Abstract
The effects of etch parameters on dry etching of BLT thin films were investigated with ICP etch system in
Keywords