Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
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- Pages.1873-1876
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- 2003
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- 2005-8446(pISSN)
Surface polishing of Micro channel using Magneto-Rheological fluid
MR유체를 이용한 미세 채널구조물의 표면연마
Abstract
Magneto-rheological polishing is a new technology used in precision polishing. It utilizes magneto-rheological fluid. nonmagnetic polishing abrasive, aqueous carrier fluids in magnetic field to remove material from a part surface. Silicon micro channel as work piece is fixed in the slurry which is made of MR fluid and CeO
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