Automatic Diameter Control for Crystal Grower

단결정 실리콘 성장기의 자동 직경 제어

The automatic diameter control system of the Crystal Grower has a good performance with only PD control. But it contained the integrator the plant which has a long time delay. In this paper. we show the secondary approximate model and applies time delay controller which is good performance for in the long time delay plant. It will be able to improve the response characteristic against a standard input and a load disturbance.