Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2003.07c
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- Pages.2553-2556
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- 2003
Implementation of SECS/GEM Communication Protocol for Wafer Aligner
웨이퍼 정렬기의 SECS/GEM통신 구현 및 운용시험
- Jo, Jae-Geun (Dept. of Electronics Engineering, Chungnam National University) ;
- Park, Hong-Lae ;
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Lyou, Joon
(Dept. of Electronics Engineering, Chungnam National University)
- Published : 2003.07.01
Abstract
In the semiconductor equipment industry, the SECS/GEM protocol has been recognized as the communication standard, but in our 300mm wafer aligner being developed, this capability has not been equipped yet. In this study, we present the realization of SECS-I, SECS-II and HSMS communication protocol between factory host computer and wafer aligner. Its validity is shown in actual test environment.
Keywords