Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2003.10a
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- Pages.381-385
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- 2003
The Micro-Actuator Development of using the Bubble
기포를 이용한 마이크로 액츄에이터 개발
Abstract
This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.