Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2003.10a
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- Pages.313-317
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- 2003
A Study on the Ultra-Precision Polishing Technique for the Upper Surface of the Micro-Channel Structure
미세채널 구조물 상부의 초정밀 연마 기술 연구
Abstract
Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75
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