전자석 액츄에이터에 의한 수동방진 테이블의 제어

Vibration control of the vibration isolation system using the electromagnetic actuator

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.