A Study on the Development of the Rotary Stage for Multi-Channel Optical Alignment System

다채널 광정렬 장치 로터리 스테이지 개발에 관한 연구

In recent years, as the optical Communication systems are developed, the demands of essential parts such as splitter, coupler, WDM, and AWG filter are grow rapidly. The fabrication process for them is not, however, automatic. On that reason, the automation is needed for the grow of productivity. The optical alignment and attach ment is the core process in fabrication. In this paper, the 6-axis rotary stage for multi-channel optical alignment system is developed and the dynamic characteristic of this system is studied.