Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.03a
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- Pages.75-75
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- 2003
The Effects of ECRCVD Deposition Conditions on Nanoscale Friction of Hydrogenated Amorphous Carbon Thin Film
ECRCVD의 증착 조건에 따른 비정질 수소화 탄소의 나노스케일 마찰특성 연구
- Ko, Myoung-Gyun (Department of Nano-structure Semiconductor Engineering, Hanyang University) ;
- Lee, You-Kee (Division of Information and Communication Engineering, Uiduk University) ;
- Kim, Jung-Yuel (Division of Information and Communication Engineering, Uiduk University) ;
- Lee, Young-Ki (Division of Information and Communication Engineering, Uiduk University) ;
- Park, Jong-Wan (Department of Nano-structure Semiconductor Engineering, Hanyang University)
- Published : 2003.05.01
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