미세접합을 위한 전자빔 용접장치의 개조

Modification of Electron beam welding system for Micro joining

In this study EB(Electron Beam) welder was modified to apply EB welder to micro-joining with solder ball and Pt wire. The power and beam current of EB welder is 6kW, 100mA and the minimum current was 1mA. The minimum current of EB welder was modified to decrease the amount of beam current to 0.0lmA and the monitoring system to observe materials was made up. The control system and CAD/CAM software for e-beam direct writing was developed and the deflection beam was controlled without moving workpieces. the possibility of applying EB welder to micro-joining with solder ball and Pt wire was studied through this experiments.