Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2003.05a
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- Pages.64-65
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- 2003
The Characteristics of Heat Treatment of $TiB_2$ Thin Films Prepared by Sputtering Process
스펏터링 법으로 제조한 $TiB_2$ 박막의 열처리 특성
Abstract
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